ED15
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KrF DUV Stepper used to define 0.15μm gate
Leveraging UMC's advanced photolithography technology, Wavetek lead the industry in using DUV stepper to define 0.15μm pHEMT gate. This makes this technology suitable for future 5G mm-Wave MMIC available for high volume low cost production.
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ED25
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PA25
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